ECE 6233 - Micro Actuators

Meets with ECE 7233. This course covers various micro actuators complementing the other course of Micro Sensors, ECE 6231/7231. It builds on ECE 5221/6221, Fundamentals of Micromachining. topics include definitions, categorization, operation, and applications of various micro actuators. Particular, this course covers an introduction to basic mechanics, electrostatic, electromagnetic, piezoelectric, thermal, pneumatic, resonant actuators as well as other devices that are not covered in the micro sensors class. Registration for a weekly lab (1) is required. Extra work is required of those who registered in 7000 level.