Course Detail
Units:
4.0
Course Components:
Laboratory
Lecture
Description
This course builds on ECE 5221/6221, Fundamentals of Micromachining. Topics include definitions, categorization, comparison and application fields of microsensors. The course discusses related solid state physics, piezoresistive sensors, semiconductor-based temperature sensors, magnetoresistive sensors, thermoelectric sensors, photoelectric sensors, micro gas and fluid concentration sensors, molecular diagnostics arrays and other sensors. registration for a weekly lab (1) is required. extra work required of graduate students.