Course Detail
Units:
3.0
Course Components:
Lecture
Enrollment Information
Enrollment Requirement:
Recommended Prerequisite: MSE 6261 and 5201 and 5202.
Description
Current topics in silicon device physics. Review of MOS device theory, rules for sealing devices to submission dimensions, theoretical limits to sealing. Short channel, device models including two-dimensional numerical modes. Hot carrier effects and other reliability issues. Yield statistics, lifetime prediction.