Course Detail
Units:
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Course Components:
Laboratory
Enrollment Information
Enrollment Requirement:
Recommended Prerequisite: MSE 3210.
Description
Hands-on experience in the fabrication of silicon devices. Use of oxidation, donor and acceptor diffusion, and high resolution photolithography in a clean room facility. Characterization of silicon, measurement of basic parameters, oxide thickness, dopant diffusion. Introduction to metallization and contacts.