Course Detail
Course Components:
Enrollment Information
Enrollment Requirement:
Prerequisite: Graduate status (or instructor approval); Microsystems or semiconductor lab.
Meets with ME EN 5055/6055, BIOEN 6421, ECE 5960/6960, MET E 5055, MSE 5055/6055, CHFEN 5659-6659. Third in a 3-course series on Microsystems Engineering. This course generalizes microsystems design considerations with practical emphasis on MEMS and IC characterization/physical analysis. Two lectures, one lab per week, plus 1/2 hour lab lecture. Must also register for ME EN 6056 (0-credit lab with fees).