Course Detail
Units:
3.0
Course Components:
Laboratory
Lecture
Enrollment Information
Enrollment Requirement:
Prerequisite: Senior status; SemiCon Dev Phys./Micromanufacturing
Description
Meets with ME EN 6055, BIOEN 6421, ECE 6960, MET E 6055, MSE 6055, CHFEN 6659. Third in a 3-course series on Microsystems Engineering. This course generalizes microsystems design considerations with practical emphasis on MEMS and IC characterization/physical analysis. Two lectures, one lab per week, plus 1/2 hour lab lecture. Must also register for ME EN 6056 (0-credit lab with fees).