Prerequisite: ECE 5221/6221 or equivalent. Co-requisite: ECE 6231 or 7231.
The lab is a compulsory section to the lecture Microsensors and Actuators (ECE 6231/7231) and builds on ECE 5221/6221, Fundamentals of Micromachining. The lab will include the following topics: design and simulation of microsensors and actuators, process design, packaging and assembly, characterization and testing of microsensors and actuators as well as reliability issues. The first part of the lab will focus on the acquirement of additional technological skills and understanding of sensor characteristics. The second part of the lab will lead to the fabrication, characterization and presentation of a variety of fully functional microsensors or actuators. Examples of these are pressure, force, acceleration, gas sensors and inkjet printheads.