Course Detail
Units:
3.0
Course Components:
Lecture
Enrollment Information
Enrollment Requirement:
Prerequisite: ECE 6261 or both 5201 and 5202.
Description
Development of a thorough, working knowledge of the thermodynamic and kinetic aspects of epitaxy. This material is used to illustrate the advanced epitaxial techniques of organometallic vapor phase epitaxy, chemical beam epitaxy, and molecular beam epitaxy.